Electrostatic actuators for misalignment compensation in multi-layered microsystem devices
نویسندگان
چکیده
Electrostatic actuation is a promising approach to compensate for misalignment of bonded, multi-layered microsystem devices. The present work discusses the performance of electrostatic actuators used for in-plane misalignment compensation in an atom chip comprising an optical cavity. Experimental investigation revealed that the central frame suspending the mirrors can be moved between 3-5 m in the in-plane direction for the applied DC voltage of 90 volts. Future work involves characterizing the mirror displacement for optical tuning function. Keywods: Actuators, Alignment, Micromirrors and Optical tuning
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